Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163603 | Particle beam system and method for the particle-optical examination of an object | Stefan Schubert | 2018-12-25 |
| 10147582 | Particle beam system | Thomas Kemen, Christof Riedesel, Ralf Lenke | 2018-12-04 |
| 10115558 | Methods and devices for charge compensation | Andreas Schmaunz, Markus Esseling | 2018-10-30 |
| 9991089 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Thomas Kemen, Joerg Jacobi +4 more | 2018-06-05 |