Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147582 | Particle beam system | Dirk Zeidler, Christof Riedesel, Ralf Lenke | 2018-12-04 |
| 10121635 | Charged particle beam system and method of operating the same | Stefan Schubert, Rainer Knippelmeyer | 2018-11-06 |
| 9991089 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Joerg Jacobi, Arne Thoma +4 more | 2018-06-05 |