Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026591 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yukito Nakagawa, Motozo Kurita | 2018-07-17 |
| 9984854 | Ion beam processing method and ion beam processing apparatus | Isao Takeuchi, Mihoko Nakamura | 2018-05-29 |