Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026591 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yoshimitsu Kodaira, Motozo Kurita | 2018-07-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026591 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yoshimitsu Kodaira, Motozo Kurita | 2018-07-17 |