Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10112324 | Imprint method, imprint apparatus, and production method for article | Yukio Takabayashi, Shinichi Shudo | 2018-10-30 |
| 10022900 | Application device, imprinting apparatus, and method for manufacturing object | Tsuyoshi Arai, Yutaka Mita, Akio Saito | 2018-07-17 |
| 9952504 | Imprint method, imprint apparatus, and method for manufacturing device | Yukio Takabayashi, Shinichi Shudo | 2018-04-24 |
| 9927725 | Lithography apparatus, lithography method, program, lithography system, and article manufacturing method | Hitoshi Nakano | 2018-03-27 |
| 9915881 | Lithography apparatus and article manufacturing method | Hitoshi Nakano | 2018-03-13 |