Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10066584 | Error determination unit | — | 2018-09-04 |
| 10054074 | Device for determining abnormality in engine system | — | 2018-08-21 |
| 9945745 | Anomaly determination system and anomaly determination method | — | 2018-04-17 |
| 9927725 | Lithography apparatus, lithography method, program, lithography system, and article manufacturing method | Yoshikazu Miyajima | 2018-03-27 |
| 9915881 | Lithography apparatus and article manufacturing method | Yoshikazu Miyajima | 2018-03-13 |