Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062545 | Apparatus and method for processing substrate using ion beam | Einstein Noel Abarra, Yuta Konno | 2018-08-28 |
| 9966092 | Ion beam etching method and ion beam etching apparatus | Hiroshi Akasaka, Kiyotaka Sakamoto | 2018-05-08 |