Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062545 | Apparatus and method for processing substrate using ion beam | Yasushi Kamiya, Yuta Konno | 2018-08-28 |
| 9911526 | Magnet unit and magnetron sputtering apparatus | Tetsuya Endo | 2018-03-06 |