Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131134 | System and method for discharging electrostatic charge in nanoimprint lithography processes | — | 2018-11-20 |
| 10134588 | Imprint resist and substrate pretreatment for reducing fill time in nanoimprint lithography | Weijun Liu, Timothy Brian Stachowiak, James DeYoung | 2018-11-20 |
| 10095106 | Removing substrate pretreatment compositions in nanoimprint lithography | Timothy Brian Stachowiak, Weijun Liu, Zhengmao Ye, Toshiki Ito | 2018-10-09 |
| 10035296 | Methods for controlling spread of imprint material | Zhengmao Ye, Edward Brian Fletcher | 2018-07-31 |