Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056273 | Heating apparatus, substrate heating apparatus, and method of manufacturing semiconductor device | Masao Sasaki, Kazutoshi Yoshibayashi, Kenji Sato | 2018-08-21 |
KM
Kenzou Murata
Overall (2018): #344,131 of 503,207Top 70%
1
Patents 2018