Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056273 | Heating apparatus, substrate heating apparatus, and method of manufacturing semiconductor device | Masao Sasaki, Kenji Sato, Kenzou Murata | 2018-08-21 |
KY
Kazutoshi Yoshibayashi
Overall (2018): #347,589 of 503,207Top 70%
1
Patents 2018