Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106398 | Micromechanical structure comprising carbon material and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +3 more | 2018-10-23 |