Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128017 | Apparatus for and method of controlling debris in an EUV light source | Alexander I. Ershov, Igor V. Fomenkov, Christianus W. J. Berendsen | 2018-11-13 |
| 10064261 | Extreme ultraviolet light source | Yezheng Tao, Jordan Jur, Daniel J. W. Brown, Alexander Anthony Schafgans, Jason Michael Arcand +1 more | 2018-08-28 |