Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10064261 | Extreme ultraviolet light source | Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Daniel J. W. Brown, Alexander Anthony Schafgans +1 more | 2018-08-28 |
| 10048199 | Metrology system for an extreme ultraviolet light source | Jesse Quinn Odle | 2018-08-14 |