Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964861 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Hans Jansen, Marco Koert Stavenga | 2018-05-08 |
| 9885965 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more | 2018-02-06 |