Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927693 | Reflective mask blank and process for producing the reflective mask blank | Hiroshi Hanekawa, Kazuyuki Hayashi | 2018-03-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927693 | Reflective mask blank and process for producing the reflective mask blank | Hiroshi Hanekawa, Kazuyuki Hayashi | 2018-03-27 |