Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9988303 | Coating film-equipped glass substrate, and method for producing coating film-equipped glass substrate | Nobutaka Aomine, Hirotomo Kawahara, Yuki Aoshima, Kazunobu Maeshige | 2018-06-05 |
| 9927693 | Reflective mask blank and process for producing the reflective mask blank | Junichi Kageyama, Kazuyuki Hayashi | 2018-03-27 |
| 9922805 | Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source | Hirotomo Kawahara, Nobutaka Aomine, Kazunobu Maeshige, Yuki Aoshima | 2018-03-20 |