Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10072354 | Lower side wall for epitaxial growth apparatus | Akira Okabe | 2018-09-11 |
| 9879358 | Heat shield ring for high growth rate EPI chamber | Shinichi Oki, Yuji Aoki | 2018-01-30 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10072354 | Lower side wall for epitaxial growth apparatus | Akira Okabe | 2018-09-11 |
| 9879358 | Heat shield ring for high growth rate EPI chamber | Shinichi Oki, Yuji Aoki | 2018-01-30 |