Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9879358 | Heat shield ring for high growth rate EPI chamber | Yuji Aoki, Yoshinobu Mori | 2018-01-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9879358 | Heat shield ring for high growth rate EPI chamber | Yuji Aoki, Yoshinobu Mori | 2018-01-30 |