Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9896326 | FCVD line bending resolution by deposition modulation | Jingmei Liang, Jessica S. Kachian, Nagarajan Rajagopalan | 2018-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9896326 | FCVD line bending resolution by deposition modulation | Jingmei Liang, Jessica S. Kachian, Nagarajan Rajagopalan | 2018-02-20 |