Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041167 | Cyclic sequential processes for forming high quality thin films | Jung Chan Lee, Jinrui GUO, Mukund Srinivasan | 2018-08-07 |
| 9896326 | FCVD line bending resolution by deposition modulation | Kiran V. Thadani, Jessica S. Kachian, Nagarajan Rajagopalan | 2018-02-20 |