Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032624 | Substrate support and baffle apparatus | Roman Gouk, Han-Wen Chen, Steven Verhaverbeke | 2018-07-24 |
| 9982935 | Cryogenic system with rapid thermal cycling | Robert Webber | 2018-05-29 |