Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9932670 | Method of decontamination of process chamber after in-situ chamber clean | Jie Su, Lori D. Washington, Sandeep Nijhawan, Olga Kryliouk, Jacob Grayson +2 more | 2018-04-03 |