Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060022 | Device and method for generating a vapor for a CVD or PVD device from multiple liquid or solid source materials | — | 2018-08-28 |
| 9942946 | Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus | Andreas Poqué, Claudia Cremer, Birgit Irmgard Beccard, Karl-Heinz Trimborn | 2018-04-10 |