Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9942946 | Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus | Michael D. Long, Andreas Poqué, Birgit Irmgard Beccard, Karl-Heinz Trimborn | 2018-04-10 |