Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810993 | Mirror, in particular for a microlithographic projection exposure apparatus | — | 2017-11-07 |
| 9696632 | Mirror for the EUV wavelength range, method for producing such a mirror, and projection exposure apparatus comprising such a mirror | Gisela Von Blanckenhagen | 2017-07-04 |
| 9604441 | Laminating body | Andreas Minks, Klaus Kohl | 2017-03-28 |