Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696632 | Mirror for the EUV wavelength range, method for producing such a mirror, and projection exposure apparatus comprising such a mirror | Peter Huber | 2017-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696632 | Mirror for the EUV wavelength range, method for producing such a mirror, and projection exposure apparatus comprising such a mirror | Peter Huber | 2017-07-04 |