Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735013 | Ion implantation for improved contact hole critical dimension uniformity | John Hautala, Maureen Petterson, Boya Cui | 2017-08-15 |
| 9659784 | Ion-assisted deposition and implantation of photoresist to improve line edge roughness | Maureen Petterson, John Hautala | 2017-05-23 |