Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735013 | Ion implantation for improved contact hole critical dimension uniformity | Tristan Y. Ma, John Hautala, Maureen Petterson | 2017-08-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735013 | Ion implantation for improved contact hole critical dimension uniformity | Tristan Y. Ma, John Hautala, Maureen Petterson | 2017-08-15 |