Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581392 | Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type | Gota Niimi, Dominik Marcel Vaudrevange, Ralf Conrads | 2017-02-28 |