Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9686846 | Extreme UV radiation light source device | Yusuke Teramoto, Takahiro Hiraoka, Pieter Goldhoorn | 2017-06-20 |
| 9581392 | Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type | Dominik Marcel Vaudrevange, Ralf Conrads, Maghiel Jan Kole | 2017-02-28 |
| 9572240 | Light source apparatus | Hironobu Yabuta | 2017-02-14 |