Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798251 | Object holder, lithographic apparatus, device manufacturing method, and method of manufacturing an object holder | Raymond Wilhelmus Louis Lafarre, Satish Achanta, Matteo Filippi, Yogesh Paramod KARADE, Ronald Van Der Wilk +2 more | 2017-10-24 |
| 9753156 | Detector | Frank Verbakel, Klaus Juergen Engel, Herfried Karl Wieczorek, Eric Cornelius Egbertus Van Grunsven, Ira Blevis +1 more | 2017-09-05 |