Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798251 | Object holder, lithographic apparatus, device manufacturing method, and method of manufacturing an object holder | Raymond Wilhelmus Louis Lafarre, Satish Achanta, Matteo Filippi, Yogesh Paramod KARADE, Antonius Johannes Maria Nellissen +2 more | 2017-10-24 |