Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Yu Zhu, Fan Zhi, Rong Cheng, Kaiming Yang, Zhao Liu +9 more | 2017-10-17 |
| 9766054 | Planar motor rotor displacement measuring device and its measuring method | Jinchun Hu, Yu Zhu, Wensheng Yin, Longmin Chen, Kaiming Yang +4 more | 2017-09-19 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Zhao Liu, Rong Cheng, Jing Wang, Li Tian +7 more | 2017-09-05 |
| 9547245 | Dual wafer stage switching system for a lithography machine | Yu Zhu, Yaying Chen, Dengfeng Xu, Jinsong Wang | 2017-01-17 |