Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791789 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | Ming Zhang, Yu Zhu, Fan Zhi, Rong Cheng, Zhao Liu +9 more | 2017-10-17 |
| 9766054 | Planar motor rotor displacement measuring device and its measuring method | Jinchun Hu, Yu Zhu, Wensheng Yin, Longmin Chen, Ming Zhang +4 more | 2017-09-19 |
| 9752643 | Negative stiffness system for gravity compensation of micropositioner | Yu Zhu, Ming Zhang, Zhao Liu, Rong Cheng, Jing Wang +7 more | 2017-09-05 |