Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841667 | Reflective photomask, method for manufacturing same and program for making mask pattern | — | 2017-12-12 |
| 9599909 | Electrostatic chuck cleaner, cleaning method, and exposure apparatus | Yoshihito Kobayashi | 2017-03-21 |