Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9808841 | Reticle chuck cleaner and reticle chuck cleaning method | Masamitsu Itoh, Taro Inada, Jun Watanabe | 2017-11-07 |
| 9599909 | Electrostatic chuck cleaner, cleaning method, and exposure apparatus | Takashi Kamo | 2017-03-21 |