Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725822 | Method for epitaxial growth of monocrystalline silicon carbide using a feed material including a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph | Satoshi Torimi, Tsuyoshi Matsumoto | 2017-08-08 |
| 9704733 | Storing container, storing container manufacturing method, semiconductor manufacturing method, and semiconductor manufacturing apparatus | Satoshi Torimi, Norihito Yabuki | 2017-07-11 |
| 9644894 | Semiconductor device manufacturing apparatus | Satoshi Torimi, Norihito Yabuki | 2017-05-09 |
| 9570306 | Surface treatment method for single crystal SiC substrate, and single crystal SiC substrate | Satoshi Torimi, Norihito Yabuki | 2017-02-14 |