Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704733 | Storing container, storing container manufacturing method, semiconductor manufacturing method, and semiconductor manufacturing apparatus | Satoshi Torimi, Satoru Nogami | 2017-07-11 |
| 9644894 | Semiconductor device manufacturing apparatus | Satoshi Torimi, Satoru Nogami | 2017-05-09 |
| 9570306 | Surface treatment method for single crystal SiC substrate, and single crystal SiC substrate | Satoshi Torimi, Satoru Nogami | 2017-02-14 |