Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9598768 | Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide film | Takahiro Shirahata, Akio Yoshida, Masahisa Kogura | 2017-03-21 |
| 9574271 | Method for forming metal oxide film, metal oxide film and apparatus for forming metal oxide film | Takahiro Shirahata, Akio Yoshida, Shizuo Fujita, Naoki Kameyama, Toshiyuki Kawaharamura | 2017-02-21 |