Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9574271 | Method for forming metal oxide film, metal oxide film and apparatus for forming metal oxide film | Hiroyuki Orita, Takahiro Shirahata, Akio Yoshida, Naoki Kameyama, Toshiyuki Kawaharamura | 2017-02-21 |