Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9784573 | Positional deviation measuring device, non-transitory computer-readable recording medium containing a positional deviation measuring program, and method of manufacturing semiconductor device | Hidenori Sato, Yosuke Okamoto, Nobuhiro Komine | 2017-10-10 |
| 9632407 | Mask processing apparatus and mask processing method | Hidenori Sato, Nobuhiro Komine, Taketo Kuriyama | 2017-04-25 |
| 9541847 | Imprint method and imprint system | Masato Suzuki, Takuya Kono, Kazuya Fukuhara | 2017-01-10 |