YS

Yuichiro Sakamoto

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #181,173 of 506,227Top 40%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9728381 Plasma processor and plasma processing method Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Kimihiro Higuchi, Kaoru Oohashi +3 more 2017-08-08