SK

Satoshi Kayamori

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #254,590 of 506,227Top 55%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9728381 Plasma processor and plasma processing method Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more 2017-08-08