Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810905 | Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium | Toru Yamauchi, Sensho Kobayashi, Hiroshi Nakamura, Gaku Ikeda, Kazuya Uoyama | 2017-11-07 |
| 9776321 | Posture holding device for holding part | — | 2017-10-03 |
| 9620402 | Alignment apparatus and substrate processing apparatus | Toru Yamauchi | 2017-04-11 |
| 9607389 | Alignment apparatus | — | 2017-03-28 |