Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810905 | Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium | Toshiaki Kodama, Toru Yamauchi, Sensho Kobayashi, Hiroshi Nakamura, Gaku Ikeda | 2017-11-07 |
| 9704367 | Clean-room monitoring device and method for monitoring clean-room | Atsushi Suzuki, Yoshitaka Konishi, Daisuke Oku, Yoshitada Honda | 2017-07-11 |