Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9765430 | Plasma processing apparatus and film formation method | Takenao Nemoto, Koji Yamagishi, Hiroshi Kaneko | 2017-09-19 |
| 9543191 | Wiring structure having interlayer insulating film and wiring line without a barrier layer between | Takenao Nemoto, Yugo Tomita, Hirokazu Matsumoto, Akihide Shirotori, Akinobu Teramoto +1 more | 2017-01-10 |