Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728417 | Method for processing base body to be processed | Masaki Inoue, Toshihisa Ozu, Jun Yoshikawa | 2017-08-08 |
| 9595425 | Antenna, dielectric window, plasma processing apparatus and plasma processing method | Naoki Matsumoto, Wataru Yoshikawa, Jun Yoshikawa, Kazuki Moyama, Kiyotaka Ishibashi +1 more | 2017-03-14 |