Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837304 | Sidewall protection scheme for contact formation | Robert D. Clark | 2017-12-05 |
| 9607829 | Method of surface functionalization for high-K deposition | Robert D. Clark | 2017-03-28 |
| 9558962 | Substrate processing method | Fumitaka Amano | 2017-01-31 |