Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618836 | Reflective mask blank for EUV lithography, substrate with funtion film for the mask blank, and methods for their production | Junichi Kageyama | 2017-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618836 | Reflective mask blank for EUV lithography, substrate with funtion film for the mask blank, and methods for their production | Junichi Kageyama | 2017-04-11 |